Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

• Loïc Crouzier,
• Alexandra Delvallée,
• Sébastien Ducourtieux,
• Laurent Devoille,
• Guillaume Noircler,
• Christian Ulysse,
• Olivier Taché,
• Elodie Barruet,
• Christophe Tromas and
• Nicolas Feltin

Beilstein J. Nanotechnol. 2019, 10, 1523–1536, doi:10.3762/bjnano.10.150

• equality between their height and their lateral diameters. However, discrepancies between AFM and SEM measurements have been observed, showing significant deviation from sphericity as a function of the nanoparticle size. Keywords: AFM; hybrid metrology; nanoparticles; SEM; size distribution; uncertainty

• budget; Introduction AFM (atomic force microscopy) or SEM (scanning electron microscopy) are considered to be reference techniques for measuring the size of nanoparticles (NPs) because the measurements are based on a direct observation of the imaged NP population. This creates a direct link between the